Commodity200520062007200820092010
Hydrogen$5,101$2,542$3,150$13$6,458 
Argon$80,257$146,619$67,565$83,000$71,351$159,475
Rare gases other than argon$26,138$12,555$11,670$328,077$13,984$54,455
Nitrogen$37,079$2,597$53,874$54,405$183,196$201,344
Oxygen$10,485$10,462$169,628$4,327$60,609$6,257
Boron; tellurium     $1,067
Silicon, cont. by wt. not <99.99% of silicon$33,396     
Silicon, cont. by wt. <99.99% of silicon$49,813$150,189$938$422$165,430$56,609
Phosphorus$33,141$33,684$37,650$40,670$72,281$70,466
Arsenic  $118   
Selenium $883 $294$3,427 
Total$275,410$359,531$344,593$511,208$576,736$549,673